炬光科技榮獲“維科杯”O(jiān)Fweek 2021年度激光行業(yè)精密激光設(shè)備技術(shù)創(chuàng)新獎(jiǎng)

Time：2021-09-28

“OFweek2021（第十八屆）先進(jìn)激光技術(shù)應(yīng)用峰會(huì)暨“維科杯”年度評(píng)選頒獎(jiǎng)典禮”于2021年9月24日在深圳福田大中華喜來(lái)登酒店召開(kāi)。西安炬光科技憑借DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng)，一舉斬獲“維科杯”O(jiān)Fweek 2021年度激光行業(yè)精密激光設(shè)備技術(shù)創(chuàng)新獎(jiǎng)。

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炬光科技獲獎(jiǎng)證書(shū)及獎(jiǎng)杯

炬光科技項(xiàng)目經(jīng)理華大成（右一）

炬光科技推出的DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng)，結(jié)合了產(chǎn)生光子的共晶鍵合技術(shù)、激光光源熱管理技術(shù)、熱應(yīng)力控制技術(shù)以及調(diào)控光子的激光光束轉(zhuǎn)換技術(shù)和光場(chǎng)勻化技術(shù)，可生成一條線寬70μm，長(zhǎng)寬比達(dá)160:1的近紅外波段極窄線光斑，提供高達(dá)1800W/mm2的連續(xù)能量輸出，在光斑長(zhǎng)度方向上可達(dá)到＞95%的光斑均勻性和＞98%的連續(xù)輸出能量穩(wěn)定性，同時(shí)還具備工藝點(diǎn)溫度監(jiān)測(cè)，輸出光束質(zhì)量在線檢測(cè)等附加功能。

該產(chǎn)品主要應(yīng)用于28nm及以下半導(dǎo)體邏輯芯片制造前道工序，通過(guò)高能量密度激光照射到晶圓表面，在不到1毫秒的時(shí)間內(nèi)將表層原子層加熱到1000℃以上再急速冷卻，從而有效減少工序中產(chǎn)生的晶圓電極缺陷，提高產(chǎn)品性能，提升晶圓生產(chǎn)良品率。

DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng)能夠完成多種加工工藝，填補(bǔ)了國(guó)內(nèi)相關(guān)產(chǎn)品的空白。

炬光科技DLight?S系列半導(dǎo)體集成電路晶圓退火系統(tǒng)

炬光科技將通過(guò)技術(shù)創(chuàng)新、卓越運(yùn)營(yíng)和快速響應(yīng)，為成為全球可信賴(lài)的光子應(yīng)用解決方案提供商而不斷努力。

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炬光科技榮獲“維科杯”O(jiān)Fweek 2021年度激光行業(yè)精密激光設(shè)備技術(shù)創(chuàng)新獎(jiǎng)

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